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Automated port loading and FOUP identification

The risk of material breaks in expensive semiconductor wafers must be kept as small as possible. To ensure this is the case, sensors are used, monitoring, for example, whether a FOUP (Front Opening Unified Pod) is jittering too much when being lowered. The miniature photoelectric sensor WL100L detects these kinds of unwanted movements. As a Class 1 laser sensor, it poses no risk to the operator. The EcoLine wire draw encoder, lightweight at just 180 grams and also energy-saving (3 W), provides the exact position of the FOUP. Information about the FOUPs, which ultimately provides information about the location of the wafer, is required for effective process control. Regardless of whether a RFID, 1D, or 2D code reader is being used, SICK's 4Dpro concept ensures that all of these have the same connectivity and user interfaces and can be integrated without any problems.

  • Following product families can be used
    Intelligent RFID communication
    • 13.56 MHz RFID read/write device for read ranges up to 240 mm
    • Transponder communication according to ISO/IEC 15693 standard
    • Compact, industrial design with integrated antenna
    • Embedded protocols allow interfacing with standard industrial fieldbus technologies
    • Powerful micro-processor executes internally configurable logic
    • Flexible trigger control
    • Supports parameter cloning via microSD memory card
    • Built-in diagnostics
    Perfect sight - in any light
    • Intelligent decoding algorithms and high-performance DPM decoder
    • Immune to ambient light
    • Powerful LEDs in red, blue, infrared
    • Flexible optical accessories such as polarizing filter or dome attachment
    • Compact housing with swivel connector
    • Setup wizard with auto focus, aiming laser, green feedback LED
    • microSD card for storing images and backup copies of parameters
    • Innovative data handling with comprehensive sorting, filtering, and output formatting functions
    Powerful scanner – flexible use
    • CAN, Ethernet TCP/IP, PROFINET, and EtherNet/IP available on board, no additional gateway needed (depending on variant)
    • SMART620 code reconstruction technology
    • Flexible sorting, filtering, and logical functions
    • Advanced, easy-to-use SOPAS configuration software
    • High scanning frequency of up to 1,200 Hz
    • Small housing
    • Advanced remote diagnostics and network monitoring capabilities available over Ethernet
    • IP 65 or IP 69K rated (depending on type)
    Modular wire draw encoder in miniature design
    • Measured lengths: 1.25 m ... 10 m
    • Modular measuring system with a wide selection of interfaces/measuring lengths
    • Very small, slim housing (55 mm ... 190 mm) with spring integrated in the measurement drum
    • Light yet shock-proof and temperature-resistant plastic housing
    • Analog interface with teach-in function at the encoder
  • Following products can be used
    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: NPN
    • Switching mode: Light/dark switching
    • Connection type: Cable, 3-wire, 2 m
    • Light source: Laser
    • Adjustment: Potentiometer
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Connector M8, 3-pin
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Cable, 3-wire, 2 m
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: NPN
    • Switching mode: Light/dark switching
    • Connection type: Connector M8, 3-pin
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Male connector M8, 4-pin
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: NPN
    • Switching mode: Light/dark switching
    • Connection type: Male connector M8, 4-pin
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Connector M8, 3-pin
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Cable with M12 male connector, 4-pin, 290 mm
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Cable with M12 male connector, 4-pin, 0.2 m
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Cable with M12 male connector, 4-pin, 0.2 m
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Cable with connector M8, 3-pin, 200 mm
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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    W100 Laser
    • Sensing range max.: 0.08 m ... 12 m
    • Sensor principle: Photoelectric retro-reflective sensor
    • Detection principle: Dual lens
    • Switching output: PNP
    • Switching mode: Light/dark switching
    • Connection type: Cable with connector M8, 3-pin, 200 mm
    • Light source: Laser
    • Adjustment: Potentiometer
    Details
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