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Presence and position monitoring on the wafer robot

Two G2F photoelectric sensors on the wafer robot check for the presence and correct position of wafers. The very high detection accuracy of the photoelectric sensors for reflective, transparent and shiny object surfaces enable them to reliably detect the wafer. The miniature housing of the G2F makes it especially suitable for integration into the narrow grippers of the wafer robot.

  • Following product families can be used
    Outstanding performance in miniature format
    • Ultra-thin housing for the tightest of installation spaces
    • BGS: Object detection starting from just 8 mm
    • Detection of objects from 0.1 mm in size
    • Reliable detection of jet-black, specular, transparent, and shiny objects
    • PinPoint LED
    • VISTAL® housing, steel mounting plates
    • Can be adjusted individually to OEM requirements

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