Monitoring the positions of wafer carriers

The position of the wafer carrier can be determined reliably with absolute encoders: with the AFS60 Singleturn on the vertical and the AFM60 Multiturn on the horizontal axis. Thanks to the fieldbus and Industrial Ethernet interface, it is possible to integrate the encoders into the machine controller easily and cost-effectively and they can be used even under extreme ambient conditions such as high temperatures.

  • Following product families can be used
    • High-resolution, 30-bit absolute encoder
    • Integrated web server and FTP server
    • DLR (Device Level Ring)
    • Function module
    • Comprehensive diagnostic functions
    • IP addressing via software or hard-ware
    • Round axis functionality (transmission calculation)
    • Rugged absolute multiturn encoder with up to 31 bits (14-bit singleturn and 17-bit multiturn)
    • Face mount flange, servo flange or blind hollow shaft
    • Compact design (<70 mm)
    • Integrated PROFIBUS interface with DP V0, V1, and V2 functionality (depending on type)
    • Connectivity: 3 x M12 male connector
    • Protection class up to IP67
    • Operating temperature: –30 to +80 °C (depending on type)