Flow measurement for controlled cooling in the silicon furnace

Hot silicon ingots must be cooled along a gradual curve (30+ hrs.) or yield and quality will be compromised. The cooling cycle depends on controlling water flow, and the SICK FFU ultrasonic flow sensors provide real-time data for precise control. The IO-Link adds bidirectional update capability, a key automation advantage.

  • Following product families can be used
    • Flow sensor for conductive and non-conductive liquids
    • Compact design with no moving parts
    • Process temperature up to 80 °C, process pressure up to 16 bar
    • High chemical resistance due to seal-free sensor design
    • Large display with membrane keyboard
    • Integrated empty tube detection