Corrosive chemical level measurement in wafer cleaning machines

Aggressive chemicals are used in different phases of semiconductor and solar wafer production and then stored in tanks. The UP56 Pure ultrasonic level sensor with PTFE membrane and PTFE housing in the area of the flange reliably detects the level of storage tanks. It features analog and digital outputs, which enables easy electrical integration. It is mechanically compatible with typical industry connections.

  • Following product families can be used
    • Ultrasonic level sensor with very high chemical resistance
    • Non-contact measurement in immersion pipe of up to 1,500 mm
    • PTFE-coated membrane and GF D40 process connection made of PTFE
    • Pressure resistant up to 6 bar, temperature resistant up to 85°C
    • Different sizes available
    • Analog output selectable between 4 mA to 20 mA and 0 V to 10 V
    • Switching output for monitoring the maximum and minimum limit